TSMC, Samsung, and Intel shore up support with ASML to deploy larger High-NA EUV photomasks — 6×12-inch photomask transition may take years despite unified effort

ASML, Intel, Samsung, and TSMC are teaming up to drive the industry transition to 6×12-inch photomasks (reticles). This shift is paramount for High-NA EUV lithography, as the larger stencil would enable printing large chips in a single pass, instead of having to stitch smaller designs together, as ASML explained in a press release this week.This kind of collaboration between chipmakers isn't entirely unheard of, but it is rare. But when they face an industry-wide challenge, they set aside their rivalry and join forces to move the industry forward. This happened several times in recent decades, first with the failed transition to 450-mm wafers co-funded by GlobalFoundries, IBM, Intel, Samsung, TSMC, and New York State, then with the EUV transition, which was spearheaded by Intel, TSMC, and Samsung.